ROHM Semiconductor USA, LLC KXUD9 Series KXUD9-1026

The KXUD9 series of linear accelerometers and inclinometers is designed to provide flexibility. These sensors can accept supply voltages between 1.8V and 3.6V. Sensitivity is user selectable at 2g, 4g, 6g, and 8g. Several user-programmable internal low pass filters eliminate the need for external filter capacitors. The auxiliary input provides access to the embedded A/D converter.These high-performance silicon-micromachine d linear sensors consist of a sensor element and an ASIC packaged in a 3x3x0.9mm Land Grid Array (LGA). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A/D converter and is accessed via an inter-integrated circuit (I2C) or serial peripheral interface (SPI) digital communications.