ROHM Semiconductor USA, LLC Tri-Axis, ±2g, Analog, 3x3x0.9mm LGA KXTC9-2050

The KXTC9 is a high-performance, tri-axis accelerometer with analog outputs, a factory-programmable low-pass filter and g-range from ±1.5g to ±6g. The KXTC9 operates from a 1.8 V to 3.6 V DC supply and comes in a 3 x 3 x 0.9 mm, 10-pin, LGA package with an operating temperature range of -40°C to +85°C.

The KXTC9 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 1.8V and 3.6V. Sensitivity is factory programmable allowing customization for applications requiring from ±1.5g to ±6g ranges. Several pre-set internal low pass filters can eliminate the need for external filter capacitors. If the pre-set values are not optimal for an application, the sensor bandwidth is user-definable with the use of external capacitors.These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 3x3x0.9mm Land Grid Array (LGA). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, fabricated using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.