Kionix, Inc. KXR94 Series KXR94-2353

Suppliers

Company
Product
Description
Supplier Links
KXR94 Series - KXR94-2353 - Kionix, Inc.
Ithaca, NY, USA
KXR94 Series KXR94-2353
These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXR94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.5V and 5.25V. Sensitivity is factory programmable allowing customization for applications requiring from ±1.0g to ±5.0g ranges. Sensor bandwidth is user-definable. The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A/D converter and is accessed via serial peripheral interface (SPI). The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.
Supplier's Site

Technical Specifications

  Kionix, Inc.
Product Category Accelerometers
Product Number KXR94-2353
Product Name KXR94 Series
Frequency Range 800 Hz
Sensor Technology MEMS
Sensor Outputs Acceleration
Operating Temperature -40 to 185 F (-40 to 85 C)
Device Category Sensor / Transducer
Unlock Full Specs
to access all available technical data

Similar Products