These high-performance silicon micromachined linear accelerometersand inclinometers consist of a sensor element and an ASIC packaged in a5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricatedfrom single-crystal silicon with proprietary Deep Reactive Ion Etching(DRIE) processes and is protected from the environment by ahermetically-sealed silicon cap at the wafer level. TheKXP74 series is designed to provide a high signal-to-noise ratio withexcellent performance over temperature. These sensors can accept supplyvoltages between 2.7V and 5.25V. Sensitivity is factory programmableallowing customization for applications requiring from ±1.5g to ±6.0granges. Sensor bandwidth is user-definable. The sensorelement functions on the principle of differential capacitance.Accelera
tion causes displacement of a silicon structure resulting in achange in capacitance. An ASIC, using a standard CMOS manufacturingprocess
, detects and transforms changes in capacitance into an analogoutput voltage, which is proportional to acceleration. This voltage isdigitized by an on-board A/D converter and is accessed via a SerialPeripheral Interface (SPI). The sense element design utilizes commonmode cancellation to decrease errors from process variation andenvironmental stress.
These high-performance silicon micromachined linear accelerometersand inclinometers consist of a sensor element and an ASIC packaged in a5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricatedfrom single-crystal silicon with proprietary Deep Reactive Ion Etching(DRIE) processes and is protected from the environment by ahermetically-sealed silicon cap at the wafer level. TheKXP74 series is designed to provide a high signal-to-noise ratio withexcellent performance over temperature. These sensors can accept supplyvoltages between 2.7V and 5.25V. Sensitivity is factory programmableallowing customization for applications requiring from ±1.5g to ±6.0granges. Sensor bandwidth is user-definable. The sensorelement functions on the principle of differential capacitance.Acceleration causes displacement of a silicon structure resulting in achange in capacitance. An ASIC, using a standard CMOS manufacturingprocess, detects and transforms changes in capacitance into an analogoutput voltage, which is proportional to acceleration. This voltage isdigitized by an on-board A/D converter and is accessed via a SerialPeripheral Interface (SPI). The sense element design utilizes commonmode cancellation to decrease errors from process variation andenvironmental stress.
