These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXD94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.75 - 5.25V. Sensitivity is factory programmable for applications requiring from ±5.0g to ±15.0g ranges. Sensor bandwidth is user-definable. Thesensor element functions on the principle of differential capacitance.Accelera
tion causes displacement of a silicon structure resulting in achange in capacitance. An ASIC, using a standard CMOS manufacturingprocess
, detects and transforms changes in capacitance into an analogoutput voltage, which is proportional to acceleration. The senseelement design utilizes common mode cancellation to decrease errorsfrom process variation, temperature, and environmental stress.
These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap at the wafer level. The KXD94 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.75 - 5.25V. Sensitivity is factory programmable for applications requiring from ±5.0g to ±15.0g ranges. Sensor bandwidth is user-definable. Thesensor element functions on the principle of differential capacitance.Acceleration causes displacement of a silicon structure resulting in achange in capacitance. An ASIC, using a standard CMOS manufacturingprocess, detects and transforms changes in capacitance into an analogoutput voltage, which is proportional to acceleration. The senseelement design utilizes common mode cancellation to decrease errorsfrom process variation, temperature, and environmental stress.
