The IPUP (Integrated Point of Use Pump) is designed for integration on semiconductor process tools and cleanroom operation. Replacing larger remote dry pumps located away from the process tools.
Features of the pumps are compactness, cleanliness, high pumping speed, quiet operation, energy efficiency, interchangeability and design for integration.
| PTB Sales, Inc. | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | Edwards E100L |
| Product Name | IPUP Dry Pumps |
