$7,200 ASTeX ASTRONex Fl20620 generator. 400 kHz output, 208 3φ input, 38 lbs.
The MKS ASTeX ASTRONex reactive gas generator is a reactive source for chamber cleaning and other reactive gas applications. The ASTRONex uses low field toroidal plasma to dissociate input gas to produce downstream reactive chemistries. It effectively dissociates alternative gases such as C3F8 and CF4 as an atomic florine generator.