Proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications
FEATURES
PTFE heating elements are in direct contact with the DI water for maximum efficiency and fast response.
Capable of temperatures up to 95° C and pressures up to 100 PSIG at essentially any flow rate.
Uptimes of greater than 99% can be expected.
Patented heater purge ensures heater integrity and longevity.
Thousands of heater installations worldwide. Experienced engineering and worldwide field service support.
Certification: SEMI S2/S3
SPECIFICATIONS
Patented resistive heating system utilizing a precision resistance wire, 15 w/in² (2 w/cm²) watt density
24kW to 312kW standard
Up to 600 volt (three phase) available, 50/60 Hz
Temperature Limit; 95° C, depending on operating conditions
Temperature Accuracy: +/-0.3° C, depending on operating conditions
Flow Rate: 1 LPM (.25 GPM) to 200 LPM (50 GPM)
Pressure Rating: 100 PSIG (689 kPa) maximum operating
Temperature Regulating System: Distributive zero crossing SSR switched by PLC-based DAC™ “Demand Anticipation Control” software
“J” type thermocouple (process), “E” type (element overtemperature), or customer specified
Wetted Surfaces: Heating elements: continuous virgin PTFE Polytetrafluoroethyl
ene (82%). Chamber and plumbing: PVDF Polyvinylidine Fluoride (18%). Chemraz® o-rings. No wetted metal or coated metal parts
Element Gas Purge: Removes permeation to extend element life expectancy and monitors integrity of element tubing
OPTIONS AVAILABLE (CONSULT FACTORY)
Custom communication protocol (Ethernet, DeviceNet, RS232, RS485, Mod Bus., etc.)
Expanded remote interface signals
Digital resistivity monitor
CE Compliance
Proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications
-
FEATURES
- PTFE heating elements are in direct contact with the DI water for maximum efficiency and fast response.
- Capable of temperatures up to 95° C and pressures up to 100 PSIG at essentially any flow rate.
- Uptimes of greater than 99% can be expected.
- Patented heater purge ensures heater integrity and longevity.
- Thousands of heater installations worldwide. Experienced engineering and worldwide field service support.
- Certification: SEMI S2/S3
-
SPECIFICATIONS
- Patented resistive heating system utilizing a precision resistance wire, 15 w/in² (2 w/cm²) watt density
- 24kW to 312kW standard
- Up to 600 volt (three phase) available, 50/60 Hz
- Temperature Limit; 95° C, depending on operating conditions
- Temperature Accuracy: +/-0.3° C, depending on operating conditions
- Flow Rate: 1 LPM (.25 GPM) to 200 LPM (50 GPM)
- Pressure Rating: 100 PSIG (689 kPa) maximum operating
- Temperature Regulating System: Distributive zero crossing SSR switched by PLC-based DAC™ “Demand Anticipation Control” software
- “J” type thermocouple (process), “E” type (element overtemperature), or customer specified
- Wetted Surfaces: Heating elements: continuous virgin PTFE Polytetrafluoroethylene (82%). Chamber and plumbing: PVDF Polyvinylidine Fluoride (18%). Chemraz® o-rings. No wetted metal or coated metal parts
- Element Gas Purge: Removes permeation to extend element life expectancy and monitors integrity of element tubing
-
OPTIONS AVAILABLE (CONSULT FACTORY)
- Custom communication protocol (Ethernet, DeviceNet, RS232, RS485, Mod Bus., etc.)
- Expanded remote interface signals
- Digital resistivity monitor
- CE Compliance
