The Newport ZVR-PP is an integrated vertical and stepper motor rotation stage for precise wafer positioning, offering 10 mm of vertical travel and continuous 360° rotation in a low-profile design. It features a 50 mm center aperture for cable management and a three-point drive system to minimize deflection under off-center loads. Stainless steel recirculating ball bearings support a 100 N center load capacity. Maximum vertical speed is 10 mm/s, and rotational speed is 40°/s. Unidirectional repeatability is ±0.0005° (guaranteed ±0.0015°), and bidirectional repeatability is ±0.0013° (guaranteed ±0.003°). Vertical accuracy is ±0.5 µm (guaranteed ±2 µm), with bidirectional repeatability of ±1.2 µm (guaranteed ±2 µm). It includes an adjustable upper limit switch, a 3-meter shielded cable, and is ESP-compatible. The stage has an MTBF of 20,000 hours and meets ASME B5.57 and ISO 230-2 standards.
Newport’s new ZVR-PP is an integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PP offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. The low mass and high natural frequency of the ZVR-PP, provides a platform for rapid step-and-settle applications. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PP offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for full specifications on the ZVR-PP.Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PP.
| Newport MKS | |
|---|---|
| Product Category | Rotary Stages |
| Product Number | ZVR-PP |
| Product Name | Wafer Positioning Stage, Integrated Vertical and Stepper Rotation Stage |
| Stage Type | Rotary Positioning |
