The HybrYX single plane XY hybrid stages are the latest addition to our air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. HybrYX-HD with DynaQuiet™- Soft Isolation System is well suited for semiconductor wafer processing systems, as well as being an excellent choice for use in large substrate inspection and processing tools. The DynaQuiet™ option allows the system to operate at higher speed & acceleration (High Dynamic) without sacrificing stability at the point of interest or inducing vibrations into the floor.
| Newport MKS | |
|---|---|
| Product Category | Linear Slides and Linear Stages |
| Product Number | HYBRYX-HD |
| Product Name | New Hybrid Air Bearing XY Stage System, High Dynamic, Soft Isolation System |
