The L100 CMM laser scanner offers the best possible combination of speed, accuracy and ease-of-use. Suited for both surface and feature measurement, the L100 quickly delivers accurate data and insightful part-to-CAD comparison reports even on shiny or multi-material surfaces.The L100 is ideal to inspect larger components where productivity is key, but without having to compromise on accuracy. Equipped with a high quality glass Nikon lens and a high definition camera, the L100 features a point resolution of 42 µm and an exceptionally small probing error of 6.5 µm, enabling delivery of smooth meshes and high levels of detail.
Highlights
Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90° increments
SEMI-compliant kinematic plate provides perfect X,Y,Z coordinates
Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes
Laser AF provides fast, non-contact measurements of wafer positions
Wide area, high-intensity LED illumination enables accurate measurements of wafer heights
300mm, 200mm wafer carrier and SMIF Pod base
The L100 CMM laser scanner offers the best possible combination of speed, accuracy and ease-of-use. Suited for both surface and feature measurement, the L100 quickly delivers accurate data and insightful part-to-CAD comparison reports even on shiny or multi-material surfaces.The L100 is ideal to inspect larger components where productivity is key, but without having to compromise on accuracy. Equipped with a high quality glass Nikon lens and a high definition camera, the L100 features a point resolution of 42 µm and an exceptionally small probing error of 6.5 µm, enabling delivery of smooth meshes and high levels of detail.
Highlights
- Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90° increments
- SEMI-compliant kinematic plate provides perfect X,Y,Z coordinates
- Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes
- Laser AF provides fast, non-contact measurements of wafer positions
- Wide area, high-intensity LED illumination enables accurate measurements of wafer heights
- 300mm, 200mm wafer carrier and SMIF Pod base
