MicroSense, LLC SigmaTech Wafer Metrology Systems UltraMap-200B

Description
Benchtop automated thickness measurement system with X-Y stage on air bearing for wafers up to 8” round and for square wafers up to 156mmx156mm. Dual white light chromatic coding probe technology with 10nm resolution Thickness range from 50um to 1mm Automated calibration Hiscan option for surface roughness and link profile measurement and other surface structures Applications Solar Wafers QA and QC, Cost effective, compact metrology tool for R&D labs for all type of wafers and surfaces.
Description
Benchtop automated thickness measurement system with X-Y stage on air bearing for wafers up to 8” round and for square wafers up to 156mmx156mm. Dual white light chromatic coding probe technology with 10nm resolution Thickness range from 50um to 1mm Automated calibration Hiscan option for surface roughness and link profile measurement and other surface structures Applications Solar Wafers QA and QC, Cost effective, compact metrology tool for R&D labs for all type of wafers and surfaces.

Suppliers

Company
Product
Description
Supplier Links
SigmaTech Wafer Metrology Systems - UltraMap-200B - MicroSense, LLC
Lowell, MA, USA
SigmaTech Wafer Metrology Systems
UltraMap-200B
SigmaTech Wafer Metrology Systems UltraMap-200B
Benchtop automated thickness measurement system with X-Y stage on air bearing for wafers up to 8” round and for square wafers up to 156mmx156mm. Dual white light chromatic coding probe technology with 10nm resolution Thickness range from 50um to 1mm Automated calibration Hiscan option for surface roughness and link profile measurement and other surface structures Applications Solar Wafers QA and QC, Cost effective, compact metrology tool for R&D labs for all type of wafers and surfaces.

Benchtop automated thickness measurement system with X-Y stage on air bearing for wafers up to 8” round and for square wafers up to 156mmx156mm.

  • Dual white light chromatic coding probe technology with 10nm resolution
  • Thickness range from 50um to 1mm
  • Automated calibration
  • Hiscan option for surface roughness and link profile measurement and other surface structures

Applications

Solar Wafers QA and QC, Cost effective, compact metrology tool for R&D labs for all type of wafers and surfaces.

Supplier's Site

Technical Specifications

  MicroSense, LLC
Product Category Wafer and Thin Film Instrumentation
Product Number UltraMap-200B
Product Name SigmaTech Wafer Metrology Systems
Form Factor Monitor or instrument
Mounting / Loading Manual loading
Technology Optical / Imaging
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