The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 5000 grams per minute to within 1.5% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Also, by utilizing its coriolis (non-invasive) based flow measurement, the Integrated Coriolis Flow Controller offers direct mass flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms.
Features:
High Accuracy - Controls flowrate to within ± 1.5% of set point; ideal for fluid blending and/or dispense applications
Fast Response 2 seconds (typically < 1 seconds for most applications)
Broad application range with 2 types of control valves
Wide range of flow control capability
All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
Mass flow measurement accuracy is independent of fluid density and viscosity
The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 5000 grams per minute to within 1.5% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Also, by utilizing its coriolis (non-invasive) based flow measurement, the Integrated Coriolis Flow Controller offers direct mass flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms.
Features:
- High Accuracy - Controls flowrate to within ± 1.5% of set point; ideal for fluid blending and/or dispense applications
- Fast Response 2 seconds (typically < 1 seconds for most applications)
- Broad application range with 2 types of control valves
- Wide range of flow control capability
- All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
- Mass flow measurement accuracy is independent of fluid density and viscosity
