Magnescale Americas, Inc. LASERSCALE® Linear, High-speed, High-resolution, Ultraprecision Measuring Scale BS78

The LASERSCALE¬Æ Linear, High-speed, High-resolution, Ultraprecision Measuring Scale, model BS78, is designed for applications requiring high precision, such as semiconductor inspection and ultraprecision processing machines. It features a signal pitch of approximately 138 nm, which surpasses traditional light wave interferometer systems. The scale offers a reference point accuracy of ¬±0.1 Oºm and a scale accuracy of ¬±0.04 Oºm for measuring lengths of 40 mm. Its non-contact design minimizes return error and enhances stability, making it unaffected by humidity, air pressure, and air disturbances. The product is available in various lengths ranging from 40 mm to 420 mm and includes options for non-magnetic and vacuum-compatible models. The thermal expansion coefficient is low at -0.7 x 10^{-6}/¬8C, ensuring consistent performance across temperature variations.