Mad City Labs, Inc. Piezo Nanopositioner Nano-Man5

The Nano-Man5 is a five axis (X, Y, Z, θX , θY) piezo nanopositioning system with closed loop feedback control for absolutely position measurement. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion. Features Compact piezo nanopositioner Five axis motion (XYZ θX θY) 50 μm x 50 μm x 25 μm x 1mrad x 1mradranges of motion Closed loop control