Kistler Group MEMS Capacitive Accelerometer 8316A

The Type 8316A... capacitive accelerometer family utilizes a silicon Micro-Electro Mechanical System (MEMS) variable capacitance sensing element. Each axis consists of a very small inertial mass and a flexure element cantilever positioned between two plates. As the mass deflects under acceleration, the capacitance between these plates changes. AC excitation and synchronous amplitude demodulation circuitry contained in the accelerometer's internal signal conditioner provides an analog output signal proportional to the applied acceleration. This output signal is scaled as voltage and is proportional to the applied acceleration. There are three housing/electrical interface options (AC, TA, TB), which determine the available output signal formats. The accelerometer is powered by a single regulated supply between 6 and 50 VDC.