Proven Reliability in Plasma Vacuum Systems Worldwide
Performance: The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
Features:
Standard fixed frequencies: 2 MHz, 3.39 MHz, 13.56 MHz, 27.12 MHz
Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
ETL Marked for product safety and SEMI F47 compliant
Local control via encoder and softkey inputs
Standard RS-232 and analog/digital control
Proven Reliability in Plasma Vacuum Systems Worldwide
Performance:
The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.
Applications:
The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
Features:
- Standard fixed frequencies: 2 MHz,
3.39 MHz, 13.56 MHz, 27.12 MHz
- Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
- ETL Marked for product safety and SEMI F47 compliant
- Local control via encoder and softkey inputs
- Standard RS-232 and analog/digital control
