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High Power Range of the CX Series Family of Products
Performance:
The CX high frequency series is available in power ranges of 5000 and 10,000 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The CX series provides precise, repeatable power control with ultra-stable output. The solid-state design provides low cost of ownership with high reliability.
Applications:
The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
Features:
| Comdel, Inc. | |
|---|---|
| Product Category | Power Supplies |
| Product Number | CX 5K |
| Product Name | CX Series - High Frequency RF Power |
| Type | RF Generator; Plasma Power Supply |
| Form Factor | Rack Mount |
| Applications | High Frequency, Instrumentation, Military, Semiconductor/Thin Film, Plastic Welding, Silicon Crystal Growing |
| Features | Adjustable Frequency (optional feature); Pure Sine Output; Active Front Panel with Full Controls |
| DC Output Power | 5000 watts |
