Comdel, Inc. CLX Series - Low Frequency RF Power CLX 5000

Proven Reliability in Plasma Vacuum Systems Worldwide Performance: The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The CLX 5000 provides 5000 watts of power. The solid-state design provides low cost of ownership with high reliability. Applications: The CLX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems. Features: Reliable amplifier design with millions of trouble-free hours driving plasma systems worldwide Local control via encoder and softkey inputs Standard RS-232 and analog/digital control Control circuitry ensures consistency during high VSWR conditions Unique power monitoring measures delivered power into any impedance load Active front panel with full controls and programmable microprocessor