Proven Reliability in Plasma Vacuum Systems Worldwide
Performance: The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The CLX 5000 provides 5000 watts of power. The solid-state design provides low cost of ownership with high reliability. Applications: The CLX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
Features:
Reliable amplifier design with millions of trouble-free hours driving plasma systems worldwide
Local control via encoder and softkey inputs
Standard RS-232 and analog/digital control
Control circuitry ensures consistency during high VSWR conditions
Unique power monitoring measures delivered power into any impedance load
Active front panel with full controls and programmable microprocessor
Proven Reliability in Plasma Vacuum Systems Worldwide
Performance:
The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The CLX 5000 provides 5000 watts of power. The solid-state design provides low cost of ownership with high reliability.
Applications:
The CLX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
Features:
- Reliable amplifier design with millions of trouble-free hours driving plasma systems worldwide
- Local control via encoder and softkey inputs
- Standard RS-232 and analog/digital control
- Control circuitry ensures consistency during high VSWR conditions
- Unique power monitoring measures delivered power into any impedance load
- Active front panel with full controls and programmable microprocessor
