Comdel, Inc. CLF Series - Low Frequency RF Power CLF 1000 Full Rack

Stable, Reliable, Low Frequency Power for Industrial Heating and Plasma Processing Applications Performance: The CLF series generators provide stable process power up to 5 kW. The CLF 1000 provides 1000 watts of power. The full- rack models operate at any fixed frequency from 20 to 450 kHz or auto-tuned up to +/- 15% bandwidth. In many applications, the combination of auto-tune and excess power headroom will allow delivery of power to changing reactive loads without the need for mechanically tuned matching networks. Applications: The CLF series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems. Features: Output power leveled on delivered power No preventative maintenance required, maximum generator uptime Protection circuits safeguard amplifiers from over-voltage, over-current and over-power operating conditions Fast auto-tune circuitry on full-rack models