Comdel, Inc. CLB Series - Low Frequency RF Power CLB 5000

Comdel's Superior Design and Reliability in a Small, Lightweight Package Performance: RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The CLB 5000 provides 5000 watts of power. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CLB series is based on Comdel's proven RF amplifier technology. Applications: The CLB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems. Features: Small, lightweight packaging Standard power ranges: 2500, 3000, 5000, 6000, 12,000 Watts Any single frequency from 20 kHz to 2 MHz, varying +/-10% Phase lock tuning or software algorithm Designed to meet ETL and SEMI F47 directives Forward or Delivered power mode regulation