Comdel's Superior Design and Reliability in a Small, Lightweight Package
Performance: RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The CLB 2500 provides 2500 watts of power. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CLB series is based on Comdel's proven RF amplifier technology. Applications: The CLB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
Features:
Small, lightweight packaging
Standard power ranges: 2500, 3000, 5000, 6000, 12,000 Watts
Any single frequency from 20 kHz to 2 MHz, varying +/-10%
Phase lock tuning or software algorithm
Designed to meet ETL and SEMI F47 directives
Forward or Delivered power mode regulation
Comdel's Superior Design and Reliability in a Small, Lightweight Package
Performance:
RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The CLB 2500 provides 2500 watts of power. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CLB series is based on Comdel's proven RF amplifier technology.
Applications:
The CLB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
Features:
- Small, lightweight packaging
- Standard power ranges: 2500, 3000, 5000, 6000, 12,000 Watts
- Any single frequency from 20 kHz to 2 MHz, varying +/-10%
- Phase lock tuning or software algorithm
- Designed to meet ETL and SEMI F47 directives
- Forward or Delivered power mode regulation
