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Comdel, Inc. CB Series - High Frequency RF Power CB 500

Description
Comdel's Superior Design and Reliability in a Small, Lightweight Package Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 500 provides 500 watts of power output in a lightweight 15 lb unit. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology. Applications: The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications. Features: Small, lightweight packaging Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations. Designed to meet ETL and SEMI F47 directives Forward or Delivered power mode regulation
Datasheet

Suppliers

Company
Product
Description
Supplier Links
CB Series - High Frequency RF Power - CB 500 - Comdel, Inc.
Gloucester, MA, USA
CB Series - High Frequency RF Power
CB 500
CB Series - High Frequency RF Power CB 500
Comdel's Superior Design and Reliability in a Small, Lightweight Package Performance: RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 500 provides 500 watts of power output in a lightweight 15 lb unit. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology. Applications: The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications. Features: Small, lightweight packaging Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations. Designed to meet ETL and SEMI F47 directives Forward or Delivered power mode regulation

Comdel's Superior Design and Reliability in a Small, Lightweight Package

Performance:
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 500 provides 500 watts of power output in a lightweight 15 lb unit. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology.
Applications:
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

Features:

  • Small, lightweight packaging
  • Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation
Supplier's Site Datasheet

Technical Specifications

  Comdel, Inc.
Product Category Power Supplies
Product Number CB 500
Product Name CB Series - High Frequency RF Power
Type RF Generator; Plasma Power Supply
Applications High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP
Features Adjustable Frequency (optional feature); Pure Sine Output; HALO, Fixed Match, Master/Slave
DC Output Power 500 watts
Output Frequency 13.56 to 60 MHz
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