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Comdel's Superior Design and Reliability in a Small, Lightweight Package
Performance:
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The CB 1000 provides 1000 watts of power output in a lightweight 35 lb unit. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology.
Applications:
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
Features:
| Comdel, Inc. | |
|---|---|
| Product Category | Power Supplies |
| Product Number | CB 1000 |
| Product Name | CB Series - High Frequency RF Power |
| Type | RF Generator; Plasma Power Supply |
| Applications | High Frequency, Semiconductor/Thin Film, Semiconductor Processing, Etch, RIE ICP |
| Features | Adjustable Frequency (optional feature); Pure Sine Output; HALO, Fixed Match, Master/Slave |
| DC Output Power | 1000 watts |
| Output Frequency | 13.56 to 60 MHz |