Nanofluor® Y75G is a highly fluorinated elastomer which incorporates relatively low levels of an advanced nanoparticle type filler system, producing a clean compound formulated for minimum particle generation. Nanofluor® Y75G has been tested in various plasma types and sources and benchmarked against the leading elastomer sealing materials. Y75G was proven to have excellent resistance to aggressive oxygen and fluorine based plasmas. The material has been formulated to be used in critical locations where the seal can be directly exposed to the chemical environment such as Etch, Strip, Clean, PVD, LPCVD, HDPCVD, PECVD, SACVD and ALD.
Key attributes:
Good all round chemical and temperature resistance
Outstanding oxygen and fluorine plasma resistance
Good mechanical properties
Very low trace metal content
Low out-gassing properties making it ideal for vacuum applications
Low particle generation
Nanofluor® Y75G is a highly fluorinated elastomer which incorporates relatively low levels of an advanced nanoparticle type filler system, producing a clean compound formulated for minimum particle generation.
Nanofluor® Y75G has been tested in various plasma types and sources and benchmarked against the leading elastomer sealing materials. Y75G was proven to have excellent resistance to aggressive oxygen and fluorine based plasmas. The material has been formulated to be used in critical locations where the seal can be directly exposed to the chemical environment such as Etch, Strip, Clean, PVD, LPCVD, HDPCVD, PECVD, SACVD and ALD.
Key attributes:
- Good all round chemical and temperature resistance
- Outstanding oxygen and fluorine plasma resistance
- Good mechanical properties
- Very low trace metal content
- Low out-gassing properties making it ideal for vacuum applications
- Low particle generation
