Hitachi High Technologies America, Inc. Ultra-high Resolution Scanning Electron Microscope Regulus Series

As a new brand of FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, Regulus8220, Regulus8230, and Regulus8240, all of which extend the functions of the SU8200 series with the use of a common platform. With optimized electron optical systems, the new Regulus series features resolutions down to 0.9 nm in the Regulus8220/8230/824 0 models and 1.1 nm in the Regulus8100 model-an improvement of roughly 20% in resolution at 1 kV landing voltage compared with previous models. The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times,*1 compared with 1 million times in previous models.