Vacuum UV (VUV) monitoring photodiodes
S8553 have sensitivity in the vacuum UV region. It is specially suitable for excimer laser (ArF: 193 nm, KrF: 248 nm) monitoring.
Its design optimized for use in the VUV region provides improved stability in sensitivity for VUV light irradiation compared to previous products.
Features
- Improved reliability for excimer lasers (ArF: 193 nm, KrF: 248 nm)
- Large photosensitive area: 18 × 18 mm
- Windowless package: 25.5 × 25.5 mm ceramic package
| Hamamatsu Photonics Europe | |
|---|---|
| Product Category | Photodiodes |
| Product Number | S8553 |
| Product Name | Si photodiodes |
| Spectral Response Range | 190 to 1000 nm (1900 to 10000 Å) |
| Photodiode Material | Silicon |
| Active Area Diameter or Length | 18 mm (0.7087 inch) |
| Active Area Height | 18 mm (0.7087 inch) |
