The Inertial Sensor from First Sensor AG utilizes MEMS technology to provide high-precision measurements for applications in geoengineering, condition monitoring, and navigation. It features capacitive inclinometers and accelerometers made from single crystal silicon, ensuring excellent stability and large signal-to-noise ratios. The sensors are designed with high aspect ratio microstructures (HARMS) to achieve ultra-low cross axis sensitivities and employ patented AIM (Air gap Insulated Microstructures) technology to minimize parasitic capacitances. Key specifications include dual-axis measurement capabilities, a digital interface (I¬=C or SPI), and a shock survival rating of 2000 g. The sensors operate over a temperature range of -40 to 125 ¬8C and offer customizable measurement ranges. They are packaged in a hermetically sealed ceramic housing, making them suitable for various industrial applications, including platform control, tilt sensing, and stabilization.
First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements.
The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.
| First Sensor AG | |
|---|---|
| Product Category | Accelerometers |
| Product Name | Inertial Sensor |
| Measurement Axes | Biaxial |
| Sensor Technology | Capacitance |
| Device Category | Sensor / Transducer |
