First Sensor AG Inertial Sensor

Description
First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements. The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.
Datasheet
Description
First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements. The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.
Datasheet

Suppliers

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Product
Description
Supplier Links
Inertial Sensor -  - First Sensor AG
Berlin, Germany
Inertial Sensor
Inertial Sensor
First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements. The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.

First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements.

The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration.

Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.

Supplier's Site Datasheet

Technical Specifications

  First Sensor AG
Product Category Tilt Sensors
Product Name Inertial Sensor
Trigger Tilt Sensor
Form Factor Element / Chip
Type Capacitive
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