TECAPEEK CMP is a Victrex® PEEK polymer specially modified for applications in the semiconductor industry, and more specfically for parts in CMP (chemical mechanical planarization) equipment. The material maintains the outstanding property profile inherant to PEEK, which includes high mechanical strength and dimensional stability for tightest part tolerances, along with a low tendency to creep. TECAPEEK CMP is of a higher purity level than standard TECAPEEK. This combined with excellent chemical resistance and specially improved abrasion and friction characteristics, rounds out the property profile of this PEEK CMP modification.
Facts
Chemical designation: PEEK (Polyetheretherketon
e)
Color: beige
Density: 1,31 g/cm3
Main Features
good heat deflection temperature
good machinability
inherent flame retardant
hydrolysis and superheated steam resistant
resistance against high energy radiation
good slide and wear properties
high toughness
high creep resistance
Target industries
semiconductor technology
TECAPEEK CMP is a Victrex® PEEK polymer specially modified for applications in the semiconductor industry, and more specfically for parts in CMP (chemical mechanical planarization) equipment. The material maintains the outstanding property profile inherant to PEEK, which includes high mechanical strength and dimensional stability for tightest part tolerances, along with a low tendency to creep. TECAPEEK CMP is of a higher purity level than standard TECAPEEK. This combined with excellent chemical resistance and specially improved abrasion and friction characteristics, rounds out the property profile of this PEEK CMP modification.
Facts
- Chemical designation: PEEK (Polyetheretherketone)
- Color: beige
- Density: 1,31 g/cm3
Main Features
- good heat deflection temperature
- good machinability
- inherent flame retardant
- hydrolysis and superheated steam resistant
- resistance against high energy radiation
- good slide and wear properties
- high toughness
- high creep resistance
Target industries
