Edwards' Tempest offers exhaust management at minimal cost for preservation of assets and regulatory compliance. The Tempest is suitable for treatment of exhaust streams containing water-soluble and water-reactive gases. Tempest is suitable for many processes including Metal Etch, Poly Etch, LPCVD Nitride, PECVD Nitride and RTP.
| Edwards Vacuum | |
|---|---|
| Product Category | Scrubbers |
| Product Number | Tempest |
| Scrubber Type | Skid / Base Plate Mounted |
