Edwards Vacuum Tempest

Description
Edwards' Tempest offers exhaust management at minimal cost for preservation of assets and regulatory compliance. The Tempest is suitable for treatment of exhaust streams containing water-soluble and water-reactive gases. Tempest is suitable for many processes including Metal Etch, Poly Etch, LPCVD Nitride, PECVD Nitride and RTP.
  • Tempest - Edwards Vacuum
    Edwards Vacuum
Description
Edwards' Tempest offers exhaust management at minimal cost for preservation of assets and regulatory compliance. The Tempest is suitable for treatment of exhaust streams containing water-soluble and water-reactive gases. Tempest is suitable for many processes including Metal Etch, Poly Etch, LPCVD Nitride, PECVD Nitride and RTP.

Suppliers

Company
Product
Description
Supplier Links
- Tempest - Edwards Vacuum
Edwards Vacuum
Crawley, West Sussex, United Kingdom
Tempest
Tempest
Edwards' Tempest offers exhaust management at minimal cost for preservation of assets and regulatory compliance. The Tempest is suitable for treatment of exhaust streams containing water-soluble and water-reactive gases. Tempest is suitable for many processes including Metal Etch, Poly Etch, LPCVD Nitride, PECVD Nitride and RTP.

Edwards' Tempest offers exhaust management at minimal cost for preservation of assets and regulatory compliance. The Tempest is suitable for treatment of exhaust streams containing water-soluble and water-reactive gases. Tempest is suitable for many processes including Metal Etch, Poly Etch, LPCVD Nitride, PECVD Nitride and RTP.

Supplier's Site

Technical Specifications

  Edwards Vacuum
Product Category Scrubbers
Product Number Tempest
Scrubber Type Skid / Base Plate Mounted
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