Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
| Edwards Vacuum | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | iH160HTX |
| Product Name | iH Dry Pump |
| Vacuum Pump Type | Mechanical |
| Configuration | Combination |
| Application | Semiconductor |
| Pumping Speed | 97.02 CFM (165 m³/hr) |
| Ultimate Vacuum | 0.0075 torr (29.9 in Hg vac) |
