Waste Gas Treatment with STYRAX (burn/wet) at the Point of Use Process Waste Gas Treatment with STYRAX - Qualified for 450mm STYRAX, a DAS tool family for process waste gas abatement using burn/wet technology, is one of the latest developments within our waste gas treatment portfolio. It was specifically developed to manage demanding waste processes like CVD processes in the semiconductor and photovoltaic industries. Longer maintenance cycles increase the system’s uptime. Proven Quality for Waste Gas Treatment with STYRAX Operating Principle of STYRAX Waste Gas Treatment Systems Hazardous substances of process waste gases are treated directly from where they originate (Point-of-Use, POU). Like the well-established GIANT and UPTIMUM technology, the gases are burnt from top to bottom. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralizes combustion products such as hydrogen halides and all remaining residual gases meet strict German standards for air pollution law (TA Luft). The following equipment options are available for all STYRAX systems: Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz Fuel Gas: NG, LPG Oxidant: O2, CDA Closed-loop system: Water, Lye Heated feed lines and inlets Process-Tool-Interfa ce Signal Tower Drip Pan Earthquake Safety Kit Monitoring Your advantages: Optimized for demanding CVD processes Especially low maintenance - high uptime No inlet clogging Low pressure drop Small footprint