Waste Gas Treatment with GIANT (burn/wet)at the Point-Of-Use
Process Waste Gas Treatment with GIANT
GIANT was specifically developed for treating the larger amounts of waste gases from CVD processes in the photovoltaic and flat panel display (TFT/LCD) industries. Being part of the burn/wet-technology based DAS tools, GIANT is optimized for up to six independent inlets from CVD process tools, runs on diverse fuel gases and scrubber liquids and has access for operation and maintenance on front and back side. Operation costs and general safety can be optimized with a process tool interface.
Operating Principle of the GIANT-Systems
Process waste gases are induced through a maximum of six separate inlets. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. The scrubbing liquid cools down and neutralizes combustion products such as hydrogen halides and all remaining residual gases meet the strict German standards for the air pollution law (TA Luft).
The following equipment options are available for all GIANT systems:
Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz
Fuel Gas: NG, LPG
Closed-loop system: Water, Lye
Heated feed lines and inlets
Earthquake Safety Kit