Point-of-Use Waste Gas Treatment with ESCAPE (burn/wet) Process waste gas treatment with ESCAPE The ESCAPE technology offers an optimum combination of the two operating procedures burning & scrubbing in the smallest possible space. A concept many DAS systems for waste gas treatment use. It is an effective and highly versatile technology for point-of-use waste gas treatment with a low cost of ownership. Based on this burn/wet-technology we have developed the ESCAPE product line, which offers flexible and customized applications for the abatement of almost all process waste gases in the semiconductor and photovoltaic industries. Both heights and media supply are variable. All ESCAPE systems have a small footprint with service and maintenance access from the front and back. Installation is quick and easy and does not require specialized equipment. Operation costs and general safety can be optimized with a process tool interface. The following equipment options are available for all ESCAPE systems: Power Supply: 3 x 400 V/50 Hz or 3 x 208 V/60 Hz Fuel Gas: NG, LPG, H2 Oxidant: O2, CDA Heated feed lines and inlets Process-Tool-Interfa ce Signal Tower Drip Pan Earthquake Safety Kit Monitoring