CoorsTek Sintered Yttria Partially Stabilized Zirconia Technox® 2000

Description
Yttria (yttrium oxide, Y2O3) is a rare-earth ceramic which exhibits both exceptional plasma resistance and an aptitude for high-temperature applications. Yttria is often used to stabilize other ceramic compositions like zirconia. CoorsTek Exyria™ yttria can be formed into both solid parts and coatings for parts requiring exceptional corrosion resistance. Applying a PlasmaResist™ coating to compatible ceramic and metal components creates a corrosively inert barrier of pure yttria. Plasma resistance High stability Heat resistance Various application methods Example Applications Etch chamber components
Datasheet
Description
Yttria (yttrium oxide, Y2O3) is a rare-earth ceramic which exhibits both exceptional plasma resistance and an aptitude for high-temperature applications. Yttria is often used to stabilize other ceramic compositions like zirconia. CoorsTek Exyria™ yttria can be formed into both solid parts and coatings for parts requiring exceptional corrosion resistance. Applying a PlasmaResist™ coating to compatible ceramic and metal components creates a corrosively inert barrier of pure yttria. Plasma resistance High stability Heat resistance Various application methods Example Applications Etch chamber components
Datasheet

Suppliers

Company
Product
Description
Supplier Links
Sintered Yttria Partially Stabilized Zirconia - Technox® 2000 - CoorsTek
Golden, CO, USA
Sintered Yttria Partially Stabilized Zirconia
Technox® 2000
Sintered Yttria Partially Stabilized Zirconia Technox® 2000
Yttria (yttrium oxide, Y2O3) is a rare-earth ceramic which exhibits both exceptional plasma resistance and an aptitude for high-temperature applications. Yttria is often used to stabilize other ceramic compositions like zirconia. CoorsTek Exyria™ yttria can be formed into both solid parts and coatings for parts requiring exceptional corrosion resistance. Applying a PlasmaResist™ coating to compatible ceramic and metal components creates a corrosively inert barrier of pure yttria. Plasma resistance High stability Heat resistance Various application methods Example Applications Etch chamber components

Yttria (yttrium oxide, Y2O3) is a rare-earth ceramic which exhibits both exceptional plasma resistance and an aptitude for high-temperature applications. Yttria is often used to stabilize other ceramic compositions like zirconia.

CoorsTek Exyria™ yttria can be formed into both solid parts and coatings for parts requiring exceptional corrosion resistance. Applying a PlasmaResist™ coating to compatible ceramic and metal components creates a corrosively inert barrier of pure yttria.

  • Plasma resistance
  • High stability
  • Heat resistance
  • Various application methods

Example Applications

  • Etch chamber components
Supplier's Site Datasheet

Technical Specifications

  CoorsTek
Product Category Specialty Ceramics
Product Number Technox® 2000
Product Name Sintered Yttria Partially Stabilized Zirconia
Specialty Ceramic Type Yttria; Zirconia
Composition or ASTM/EN Cement Type  Yttria Partially Stabilized Zirconia
Applications Wear resistant parts or tooling; Can tooling, Deep well components
Max Use Temperature 1000 to 1500 C (1832 to 2732 F)
Thermal Conductivity 2.2 W/m-K (1.27 BTU-ft/hr-ft²-F)
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