Zygo Corporation Linear Interferometer (LI) 6191-0135-01

Description
These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets. ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.
  • Linear Interferometer (LI) - 6191-0135-01 - Zygo Corporation
    Zygo Corporation
Datasheet
Description
These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets. ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.
Datasheet

Suppliers

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Product
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Linear Interferometer (LI) - 6191-0135-01 - Zygo Corporation
Zygo Corporation
Middlefield, CT, United States
Linear Interferometer (LI)
6191-0135-01
Linear Interferometer (LI) 6191-0135-01
These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets. ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.

These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets.

ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.

Supplier's Site Datasheet

Technical Specifications

  Zygo Corporation
Product Category Interferometers
Product Number 6191-0135-01
Product Name Linear Interferometer (LI)
Resolution 0.31 nm (3.1 Å)
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