These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets.
ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary
| Zygo Corporation | |
|---|---|
| Product Category | Interferometers |
| Product Number | 6191-0135-01 |
| Product Name | Linear Interferometer (LI) |
| Resolution | 0.31 nm (3.1 Å) |
