Area of application:
Transfer door for Flat Panel Display and Thin Film Photovolatic production systems. Transfer doors are designed for use at atmospheric side of the in- or outcoming chamber (load lock) of a system.
Description:
The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.
Nominal inside diameters (ID):
special - special
VAT, Inc.
Done
Description
Area of application:
Transfer door for Flat Panel Display and Thin Film Photovolatic production systems. Transfer doors are designed for use at atmospheric side of the in- or outcoming chamber (load lock) of a system.
Description:
The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.
Nominal inside diameters (ID):
special - special
Area of application:
Transfer door for Flat Panel Display and Thin Film Photovolatic production systems. Transfer doors are designed for use at atmospheric side of the in- or outcoming chamber (load lock) of a system.
Description:
The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.
Nominal inside diameters (ID):
special - special
Area of application:
Transfer door for Flat Panel Display and Thin Film Photovolatic production systems. Transfer doors are designed for use at atmospheric side of the in- or outcoming chamber (load lock) of a system.
Description:
The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.
