The SplitFlow 350 is a turbomolecular vacuum pump with a hybrid bearing, designed for high gas throughput and efficient operation. It has a pumping speed of 350 l/s for N₂ and 350 l/s for He at H0 conditions, with an ultimate pressure of 1 × 10⁻⁷ hPa and compression ratios up to 1 × 10⁹ for N₂. It operates at 66,000 rpm ±2%, with variable speed control from 60% to 100%, and a run-up time of 6 minutes. The pump accepts a fore-vacuum of up to 10 hPa for N₂, uses 24 V DC input voltage, and has RS485 remote I/O interfaces. The inlet port sizes are DN 16 ISO-KF for H0, 601 × 130.4 mm for H1, and 31.5 × 135.5 mm for H2. It weighs approximately 7.6 kg, has an IP44 and Type 12 protection rating, and a sound pressure level of 50 dB(A). Mounting orientation is arbitrary.
High performance: High gas throughput, reduced power consumption, integrated sensor system for maximum safety Reliable: High temperature resistance, extremely robust thanks to hybrid bearing Efficient: Cost-efficient thanks to continuous filtration of the lubricant
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | SplitFlow 350 |
| Product Name | Turbomolecular vacuum pumps |
| Configuration | Individual Vacuum Pump |
