Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, best-in-class cooling water consumption Maintenance-free: No wearing parts thanks to magnetic bearing technology, reduced particle contamination or build-up of residue in MT version
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | ATH 3204 MT |
| Product Name | Turbomolecular vacuum pumps |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Semiconductor |
| Features | Magnetic Bearing |