Park Systems, Inc. XE-PTR

Hard Disk Drive (HDD) manufacturers can now reliably depend on Park Systems’ XE-PTR, a fully automated industrial in-line AFM for automatic Pole Tip Recession measurements on rowbar-level sliders. As most HDD manufacturers are turning to PMR (Perpendicular Magnetic Recording), sub-nano scale accuracy, repeatability, and throughput are the keys to slider inspection for improving the overall yield. Matching the highest resolution AFM in the world with the lowest one gauge sigma value for repeatability and reproduction, the XE-PTR is the perfect solution for slider manufacturers who, until now, had very limited choices for industrial grade in-line inspection tools for HDD slider metrology. Artifact Free Metrology by Crosstalk Elimination • Two independent, closed-loop XY and Z flexure scanners for sample and tip • Flat and linear XY scan of up to 100 μm x 100 μm with low residual bow • Out of plane motion of less than 2 nm over entire scan range • Accurate height and angle measurements with PTR Gauge Sigma less than 0.1 nm. • Superior tool to tool matching. Longer Tip Life by True Non-Contact Mode • 10 times larger Z-scan bandwidth than a piezotube • Less tip wear for prolonged high-quality and high-resolution imaging • Minimized sample damage or modification • Immunity from parameter-dependent results observed in tapping imaging High Throughput Feature Measurement by Programmable Data Density (PDD) • Imaging of variable pixel density for the region of interest • Automatically detects and acquires high resolution image of small region of interest • Obtains PTR, writer pole, and other features, All In One image scan • Automatic tilting stage (optional) Inline Automation • Allowable sample type: rowbars and sliders • Automatic data acquisition and analysis of slider metrology • Automatic tip exchange (optional) • HGA sample fixture (optional)