PI (Physik Instrumente) L.P. Vacuum-Compatible Actuator / Piezo Linear Motor N-331 UHV

Application fields Motion in strong magnetic fields and in a vacuum Industrial precision positioning Semiconductor technology Semiconductor tests Wafer inspection Lithography Nanoimprinting Nanometrology Suitable for sophisticated vacuum applications N-331.xxU PICMAWalk walking drives are designed vacuum compatible. Special versions of the drives are available for operation in strong magnetic fields. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation. Outstanding lifetime due to PICMA® piezo actuators The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven. Nanometer precision and high feed force with PiezoWalk® walking drives In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer. Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.