PI (Physik Instrumente) L.P. Planar Scanner with Air Bearing A-322

The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection. The cross-beam mounts to the Y axis via a highly engineered flexural coupling that provides yaw-compliance without sacrificing system stiffness. The gantry axis is a dual air-bearing design that incorporates dual linear motors and dual linear encoders. Ironless linear motors provide smooth motion and no cogging or attractive forces. Both incremental and absolute encoder options are available. The PIglide HS incorporates three high-accuracy linear encoders, one for the bridge axis and two for the gantry axis. The PIglide HS is coupled with industry-leading digital controls that offer superior servo update rates (up to 5 kHz), advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools. Travel 350mm (cross axis) x 500mm (lower axis); Other Sizes Available Flexural Coupling between Axes Dynamic Mapping Achieves Near "Laser" Performance Active Error Compensation Algorithms for Straightness and Yaw Error Motions Load to 15kg Velocity to 1m/s, Acceleration to 1g Straightness/Flatnes s to 0.25µm