The RGA150MAP low-profile, large aperture and high accuracy rotary stage addresses the need for quick angle adjustments of wafers and vacuum chucks. Although specifically tailored to semiconductor applications, the RGA150MAP can also be utilized in other industrial applications, such as through hole imaging/inspection or laser processing, automation or any general positioning application that requires fast positioning .
This is the mapped version of RGA150 that allows to achieve ±1mdeg accuracy.
| Newport MKS | |
|---|---|
| Product Category | Rotary Stages |
| Product Number | RGA150MAP |
| Product Name | Motorized Rotation Stage, High Speed, High Accuracy, Low Profile |
| Load Capacity | 11.24 lbs (5.1 kg) |