The AG-LS25V6 is the vacuum compatible version of the AG-LS25 piezo motor driven linear stage and is rated for 10-6 Torr. The AG-LS25V6 features 12 mm travel and precision motion is achieved by calibrated, pre-stressed linear ball bearings. The thermally matched stainless steel design and precision manufactured bearing surfaces provide ripple-free, low friction linear travel and angular deviations better than 200 µrad in any axis.
Use with either the Agilis™ AG-UC2 handheld, AG-UC8 or AG-UC8PC controllers.
Note: The connector supplied with the stage is not vacuum compatible due to various feed-through configurations and customer preferences. Please contact Newport for vacuum compatible connector options.
Multi-Axis Stage Configurations
Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the , 90 degree angle bracket for building XZ and XYZ stage configurations. Attention this bracket is not compatible with the AG-LS25-27 (as Z-axis). For XY stage assemblies of AG-LS25 stages, use the 4 x TC M3x4 screws supplied with each stage. The AG-LS25-27 & AG-LS25-27V6 must be positioned at the bottom of the stack (X-axis). The AG-LS25 & AG-LS25V6 stages can be stacked on top of the AG-LS25-27(V6) as the Y-axis, or as the Z-axis using the 339233, 90 degree angle bracket. Please note that the 339233, 90 degree angle bracket, is anodized and not vacuum compatible. An XZ stage stack is shown.
50 nm Minimum Incremental Motion
The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.
Vacuum Compatible Versions
The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10-6 Torr) environments.
Set-and-Forget Long-Term Stability
The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.
Ripple-Free and Low Friction Travel
The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.
| Newport MKS | |
|---|---|
| Product Category | Linear Slides and Linear Stages |
| Product Number | AG-LS25V6 |
| Product Name | Piezo Linear Stage, 12 mm travel, Vacuum Compatible |
| Axis Configuration | X Axis Only |