The Polar Kerr System for MRAM utilizes the polar Magneto-Optical Kerr Effect (MOKE) to characterize the magnetic properties of multi-layer wafers used in the development and manufacturing of perpendicular MRAM. Utilizing a non-contact full-wafer measurement technique, the system creates a map of the magnetic properties of entire wafers up to 300 mm. The system is available in a manual loading or fully-automated configuration for use in R&D and/or production. Using the proprietary direct field control technique of MicroSense magnetic metrology tools, the Polar Kerr for MRAM system offers high field capabilities and low field resolution to characterize free and pinned layer properties in a single system
| MicroSense, LLC | |
|---|---|
| Product Category | Wafer and Thin Film Instrumentation |
| Product Name | Polar Kerr System for MRAM |
| Form Factor | Monitor or instrument |
| Mounting / Loading | Floor |
| Technology | Magnetometer |
| Applications | Wafer |
