Thermal mass flow module with linearized digital / analog output
Fast and compact flow module, suitable for gas dosing systems, manifolds and analyzers. Easy to integrate with compact design, factory calibration and pins for HW address setting
Fluidic interface compatible with mass flow meter OEM (Axetris MFM 2020, MFM, 2021, MFM 2xxx)
This bidirectional mass flow meter module is also available in lower flow rate ranges:
| Innovative Sensor Technology IST USA Division | |
|---|---|
| Product Category | Sensor Chips |
| Product Number | SFS01-M-01000 |
| Product Name | SFS Module 1000 sccm |
| Package / Mounting | PCB connector JST SM08B-SRSS-TB |
