Thermal mass flow module for gas flow monitoring with a ±50 sccm flow range, factory-calibrated in sccm with 0.2% reproducibility. Compact design requires 5×4×2 cm integration space. Offers digital I²C and analog outputs with ±2% f.s. and ±5% f.s. accuracy respectively, 20 ms response time, and <6 mbar pressure loss at maximum flow. Operates on 5 V DC ±10%, consumes <10 mA, and supports I²C clock frequencies of 10 to 400 kHz with a default address of 0x28. Suitable for gas dosing, analysis, and process control with gas temperature range of 0 to +80 °C and humidity up to 95% RH non-condensing. Electrical connection via JST SM08B-SRSS-TB connector.
Thermal mass flow module with linearized digital / analog output
Fast and compact flow module, suitable for gas dosing systems, manifolds and analyzers. Easy to integrate with compact design, factory calibration and pins for HW address setting
Fluidic interface compatible with mass flow meter OEM (Axetris MFM 2020, MFM, 2021, MFM 2xxx)
| Innovative Sensor Technology IST USA Division | |
|---|---|
| Product Category | Sensor Chips |
| Product Number | SFS01-M-01-00050 |
| Product Name | SFS Module 50 sccm |
| Package / Mounting | PCB connector JST SM08B-SRSS-TB |
