Thermal mass flow module for continuous gas flow monitoring with ±200 sccm range, digital I2C and analog outputs, and a compact size requiring only 5×4×2 cm integration space. Factory calibrated for N₂ at 23 °C with ±0.2% repeatability and ≤20 ms response time. Operates on 5V DC with <10 mA power consumption, I2C communication at 10-400 kHz, and JST SM08B-SRSS-TB connector. Supports up to four modules via hardware address pins. Pressure loss is <1 mbar at maximum flow, gas temperature range is 0 to +80 °C, and humidity must be non-condensing 0 to 95% RH.
Thermal mass flow module with linearized digital / analog output
Fast and compact flow module, suitable for gas dosing systems, manifolds and analysers. Easy to integrate with compact design, factory calibration and pins for HW address setting
Fluidic interface compatible with mass flow meter OEM (Axetris MFM 2020, MFM, 2021, MFM 2xxx)
| Innovative Sensor Technology IST USA Division | |
|---|---|
| Product Category | Sensor Chips |
| Product Number | SFS01-M-00200-N2 |
| Product Name | SFS Module 200 sccm |
| Package / Mounting | PCB connector JST SM08B-SRSS-TB |
