Thermal mass flow module with linearized digital / analog output
Fast and compact flow module, suitable for gas dosing systems, manifolds and analysers. Easy to integrate with compact design, factory calibration and pins for HW address setting
Fluidic interface compatible with mass flow meter OEM (Axetris MFM 2020, MFM, 2021, MFM 2xxx)
| Innovative Sensor Technology IST USA Division | |
|---|---|
| Product Category | Sensor Chips |
| Product Number | SFS01-M-00200-N2 |
| Product Name | SFS Module 200 sccm |
| Package / Mounting | PCB connector JST SM08B-SRSS-TB |
