The PR-PD3 Particle Detection System offers excellent throughput, a dependable optical system, and functions that reduce false detections. These features are packaged together in a compact system that is designed to minimize running costs. The PR-PD3 is capable of great versatility thanks to its 0.5 μm detection sensitivity.
| HORIBA Instruments, Inc. | |
|---|---|
| Product Category | Particle Analyzers |
| Product Number | PR-PD3 |
| Product Name | Compact Reticle/Mask Particle Detection System |
| Measurement Type | Size |